JPH0726690Y2 - 溶剤監視装置 - Google Patents
溶剤監視装置Info
- Publication number
- JPH0726690Y2 JPH0726690Y2 JP1989124087U JP12408789U JPH0726690Y2 JP H0726690 Y2 JPH0726690 Y2 JP H0726690Y2 JP 1989124087 U JP1989124087 U JP 1989124087U JP 12408789 U JP12408789 U JP 12408789U JP H0726690 Y2 JPH0726690 Y2 JP H0726690Y2
- Authority
- JP
- Japan
- Prior art keywords
- solvent
- sensor
- turbidity
- time
- glass window
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002904 solvent Substances 0.000 title claims description 67
- 238000012544 monitoring process Methods 0.000 title claims description 6
- 239000011521 glass Substances 0.000 claims description 13
- 230000007257 malfunction Effects 0.000 claims description 5
- 238000012806 monitoring device Methods 0.000 claims description 5
- 230000000087 stabilizing effect Effects 0.000 claims description 2
- 230000003213 activating effect Effects 0.000 claims 1
- 230000008929 regeneration Effects 0.000 description 10
- 238000011069 regeneration method Methods 0.000 description 10
- 238000005406 washing Methods 0.000 description 7
- 239000007788 liquid Substances 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Emergency Alarm Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989124087U JPH0726690Y2 (ja) | 1989-10-25 | 1989-10-25 | 溶剤監視装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989124087U JPH0726690Y2 (ja) | 1989-10-25 | 1989-10-25 | 溶剤監視装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0363851U JPH0363851U (en]) | 1991-06-21 |
| JPH0726690Y2 true JPH0726690Y2 (ja) | 1995-06-14 |
Family
ID=31672033
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989124087U Expired - Lifetime JPH0726690Y2 (ja) | 1989-10-25 | 1989-10-25 | 溶剤監視装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0726690Y2 (en]) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6421672A (en) * | 1987-07-17 | 1989-01-25 | Nikon Corp | Pattern flaw inspection device |
-
1989
- 1989-10-25 JP JP1989124087U patent/JPH0726690Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0363851U (en]) | 1991-06-21 |
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